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Relations between the deposition conditions, the microstructure and the defects in PECVD hydrogenated amorphous carbon films; influence on the electronic density of states

✍ Scribed by Theye, M.-L.; Paret, V.; Sadki, A.


Book ID
122348905
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
150 KB
Volume
10
Category
Article
ISSN
0925-9635

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