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On the relation between defect density and dopant concentration in amorphous silicon films

✍ Scribed by Domenico Caputo; Giampiero de Cesare; Fernanda Irrera; Augusto Nascetti; Fabrizio Palma

Book ID: 117150374
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 121 KB
Volume: 266-269
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(99)00846-7

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