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EPR study of carbon and silicon related defects in carbon-rich hydrogenated amorphous silicon-carbon films

✍ Scribed by Kalabukhova, E. N.; Lukin, S. N.; Savchenko, D. V.; Shanina, B. D.; Vasin, A. V.; Lysenko, V. S.; Nazarov, A. N.; Rusavsky, A. V.; Hoentsch, J.; Koshka, Y.

Book ID
118231927
Publisher
The American Physical Society
Year
2010
Tongue
English
Weight
437 KB
Volume
81
Category
Article
ISSN
1098-0121

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The influence of carbon content on the crystallization process has been investigated for the excimer laser annealed hydrogenated amorphous silicon carbon alloy films deposited by Plasma Enhanced Chemical Vapour Deposition (PECVD) technique, using silane methane gas mixture diluted in helium, as well