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An XPS study of chemical order in hydrogenated amorphous silicon-carbon alloy films

✍ Scribed by G. B. Smith; D. R. McKenzie; P. J. Martin


Publisher
John Wiley and Sons
Year
1989
Tongue
English
Weight
341 KB
Volume
152
Category
Article
ISSN
0370-1972

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Laser annealing study of PECVD deposited
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The influence of carbon content on the crystallization process has been investigated for the excimer laser annealed hydrogenated amorphous silicon carbon alloy films deposited by Plasma Enhanced Chemical Vapour Deposition (PECVD) technique, using silane methane gas mixture diluted in helium, as well