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Thermal Equilibration in Boron-Doped Hydrogenated Amorphous Silicon-Carbon Alloy Films

✍ Scribed by He, Deyan ;Zhang, Fangqing ;Chen, Guanghua


Publisher
John Wiley and Sons
Year
1990
Tongue
English
Weight
191 KB
Volume
120
Category
Article
ISSN
0031-8965

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Nanostructured hydrogenated amorphous ca
✍ Somani, Prakash R. ;Yoshida, Akihiko ;Afre, Rakesh A. ;Adhikary, Sunil ;Soga, T. πŸ“‚ Article πŸ“… 2006 πŸ› John Wiley and Sons 🌐 English βš– 437 KB

## Abstract The synthesis of nanostructured hydrogenated amorphous carbon (a‐C:H) films doped with nitrogen using microwave‐assisted surface wave plasma chemical vapour deposition on quartz and p‐silicon substrates is reported. By controlling the deposition parameters, the Tauc band gap has been va