Deposition of diamond-like carbon films on aluminium substrates by RF-PECVD technique: Influence of process parameters

✍ Scribed by Ravi, N.; Bukhovets, V.L.; Varshavskaya, I.G.; Sundararajan, G.

• Book ID: 119966753
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 211 KB
• Volume: 16
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/j.diamond.2006.04.001