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Substrate effect on the optical properties and thickness of diamond-like carbon films deposited by the RF PACVD method

✍ Scribed by Smietana, M.; Bock, W.J.; Szmidt, J.; Grabarczyk, J.

Book ID
122766494
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
464 KB
Volume
19
Category
Article
ISSN
0925-9635

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## Abstract Amorphous hydrogenated silicon oxocarbonitride (SiCNO:H) films have been deposited by plasma‐assisted chemical vapour deposition (PACVD) using bis(trimethylsilyl)carbodiimide (BTSC) as a single source precursor in a argon (Ar) radio‐frequency plasma. In this work the SiCNO:H films depos