Correlation between thickness and optical properties of thin diamond-like carbon films deposited with RF PACVD method

✍ Scribed by M. Smietana; M.L. Korwin-Pawlowski; J. Grabarczyk; J. Szmidt

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 205 KB
• Volume: 165
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/j.mseb.2008.12.037