Tribological and optical properties of h
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Tay, B. K.; Shi, X.; Liu, E.; Tan, H. S.; Cheah, L. K.; Shi, J.; Lim, E. C.; Lee
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Article
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1999
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John Wiley and Sons
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English
β 569 KB
Unhydrogenated amorphous carbon films were deposited at different temperatures on a single silicon wafer by a process known as Filtered Cathodic Vacuum Arc. A transition from diamond-like properties to graphitic properties was observed at the substrate temperature of 200 Β°C. This change of propertie