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Influence of the substrate on the structural properties of sputter-deposited ZnO films

✍ Scribed by Kim, Hyoun Woo ;Kim, Nam Ho


Publisher
John Wiley and Sons
Year
2004
Tongue
English
Weight
120 KB
Volume
201
Category
Article
ISSN
0031-8965

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Al-doped ZnO (ZnO:Al) thin films were deposited on Si substrates using the radio-frequency reactive magnetron sputtering technique. Effect of Al contents and annealing treatments on the structural and photoluminescence (PL) properties of ZnO films was investigated. The results showed that crystallin