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Influence of different deposition parameters on the properties of hydrogenated amorphous silicon films prepared by magnetron sputtering

โœ Scribed by Debajyoti Das; Ratnabali Banerjee; A.K. Batabyal; A.K. Barua


Book ID
115986503
Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
353 KB
Volume
103
Category
Article
ISSN
0022-3093

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