Influence of the hydrogen content on the physical properties of magnetron sputtered amorphous silicon

✍ Scribed by F. Demichelis; E. Mezzetti; P. Rava; A. Tagliaferro; E. Tresso; G.A. Della Mea; P. Mazzoldi

• Book ID: 118333376
• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 160 KB
• Volume: 77-78
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/0022-3093(85)90655-6