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Correlation between physical properties and hydrogen concentration in magnetron-sputtered amorphous silicon

✍ Scribed by Demichelis, F.; Minetti-Mezzetti, E.; Tagliaferro, A.; Tresso, E.; Rava, P.; Della Mea, G. A.; Mazzoldi, P.

Book ID
118153678
Publisher
The American Physical Society
Year
1986
Tongue
English
Weight
544 KB
Volume
33
Category
Article
ISSN
1098-0121

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As-deposited a-SiNx:H (0:1 Β‘ x Β‘ 0:9) thin ΓΏlms prepared by evaporation of silicon under a ow of nitrogen and hydrogen ions exhibit visible photoluminescence at room temperature without any posttreatment. The nitrogen concentration was determined by X-ray photoemission spectroscopy. The structural c