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Properties of magnetron sputtered hydrogenated amorphous and microcrystalline silicon films alloyed with germanium

โœ Scribed by N. Saito; T. Terada; T. Yamaguchi


Book ID
118333707
Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
354 KB
Volume
83
Category
Article
ISSN
0022-3093

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