Deposition of microcrystalline hydrogenated silicon,germanium alloy (μc-SixGe1 − x:H) films by reactive magnetron sputtering (RMS)

✍ Scribed by S.M. Cho; C. Christensen; G. Lucovsky; D.M. Maher

• Book ID: 115990951
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 421 KB
• Volume: 198-200
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/0022-3093(95)00768-7