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The effects of proton irradiation on the reliability of InAlN/GaN high electron mobility transistors

โœ Scribed by Liu, L. (author);Lo, C. F. (author);Xi, Y. Y. (author);Wang, Y. X. (author);Kim, H.-Y. (author);Kim, J. (author);Pearton, S. J. (author);Laboutin, O. (author);Cao, Y. (author);Johnson, J. W. (author);Kravchenko, I. I. (author);Ren, F. (author)


Book ID
121318347
Publisher
SPIE
Year
2013
Weight
731 KB
Volume
8625
Category
Article
ISBN
0819493945
ISSN
0277-786X

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The structure of InAlN/GaN heterostructu
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## Abstract In the investigated InAlN/GaN layers, it is shown that the surface morphology and the crystallinity of the alloy critically depend on the In composition. Atomic force microscopy analysis points out that step flow growth is not easily attained in this system. When the InAlN or AlN interl