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The effect of nitrogen plasma on copper thin film deposited by DC magnetron sputtering

✍ Scribed by Hojabri, A; Haghighian, N; Yasserian, K; Ghoranneviss, M


Book ID
121434535
Publisher
IOP Publishing
Year
2010
Weight
638 KB
Volume
12
Category
Article
ISSN
1757-8981

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