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The effect of hydrogen on copper nitride thin films deposited by magnetron sputtering

✍ Scribed by Guangan Zhang; Pengxun Yan; Zhiguo Wu; Jun Wang; Jiangtao Chen

Book ID: 108060489
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 574 KB
Volume: 254
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2008.01.156

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