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Optical investigation of silicon nitride thin films deposited by r.f. magnetron sputtering

✍ Scribed by Gang Xu; Ping Jin; Masato Tazawa; Kazuki Yoshimura

Book ID: 108388533
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 176 KB
Volume: 425
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(02)01089-1

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