𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Deposition of molybdenum nitride thin films by r.f. reactive magnetron sputtering

✍ Scribed by V.P. Anitha; S. Major; D. Chandrashekharam; Mukesh Bhatnagar

Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
597 KB
Volume
79
Category
Article
ISSN
0257-8972

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Post-annealing effect in reactive r.f.-m
Post-annealing effect in reactive r.f.-magnetron-sputtered carbon nitride thin films
✍ Chen, G. L.; Li, Y.; Lin, J.; Huan, C. H. A.; Guo, Y. P. πŸ“‚ Article πŸ“… 1999 πŸ› John Wiley and Sons 🌐 English βš– 106 KB

Thin films of CN x were deposited by reactive r.f.-magnetron sputtering on Si(100) substrates. The effect of annealing temperatures on the structural properties of the films has been studied by Fourier transform infrared (FTIR) spectroscopy, x-ray photoelectron spectroscopy (XPS) and transmission el