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Nitrogen effect on the electrical properties of CNx thin films deposited by reactive magnetron sputtering

✍ Scribed by N.E. Derradji; M.L. Mahdjoubi; H. Belkhir; N. Mumumbila; B. Angleraud; P.Y. Tessier

Book ID: 108287726
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 345 KB
Volume: 482
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2004.11.137

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