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Mechanical and tribological properties of CNx films deposited by reactive magnetron sputtering

✍ Scribed by E. Broitman; N. Hellgren; O. Wänstrand; M.P. Johansson; T. Berlind; H. Sjöström; J.-E. Sundgren; M. Larsson; L. Hultman

Book ID
108390603
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
729 KB
Volume
248
Category
Article
ISSN
0043-1648

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