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The dc magnetron sputter deposition process of YBa2Cu3Ox thin films

✍ Scribed by T.I. Selinder; G. Larsson; U. Helmersson; S. Rudner; I. Petrov

Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
148 KB
Volume
162-164
Category
Article
ISSN
0921-4534

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