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DC sputter deposition of YBa2Cu3O7 thin films for two sided coating

✍ Scribed by G. Koren


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
365 KB
Volume
209
Category
Article
ISSN
0921-4534

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In situ thin films of YBa2Cu3O7 prepared
✍ J.-M. Triscone; M.G. Karkut; O. Brunner; L. Antognazza; M. Decroux; Ø. Fischer πŸ“‚ Article πŸ“… 1989 πŸ› Elsevier Science 🌐 English βš– 347 KB

We have prepared in situ thin films of YBa2fu307 by single target dc reactive magnetron sputtering. By a delicate adjustment of the oxygen partial pressure as well as the total sputtering pressure, we can grow stoichiometric films using a stoichiometric target. This method gives highly reproducible