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The chemical vapor deposition of copper and copper alloys

✍ Scribed by Pascal Doppelt; Thomas H. Baum

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 337 KB
Volume: 270
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(95)06835-x

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