๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

The characterization of amorphous carbon nitride films grown by RFCVD method

โœ Scribed by Sheng-Yuan Chen; Juh-Tzeng Lue

Book ID
117144849
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
172 KB
Volume
283
Category
Article
ISSN
0022-3093

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Characterization of low dielectric const
Characterization of low dielectric constant amorphous carbon nitride films
โœ M Aono; S Nitta; T Katsuno; T Itoh; S Nonomura ๐Ÿ“‚ Article ๐Ÿ“… 2000 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 154 KB

## ลฝ . Amorphous carbon nitride a-CN films have rather high resistivity and low dielectric constants that could be applied as x low dielectric constant materials. Several properties of a-CN films including interactions with metal electrodes are studied x and discussed using data from the frequency