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Amorphous carbon nitride film preparation by plasma-assisted pulsed laser deposition method

โœ Scribed by M. Itoh; Y. Suda; M.A. Bratescu; Y. Sakai; K. Suzuki


Publisher
Springer
Year
2004
Tongue
English
Weight
295 KB
Volume
79
Category
Article
ISSN
1432-0630

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