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EPR spectra of amorphous silicon nitride films grown by low-temperature PECVD

✍ Scribed by L.D Bogomolova; V.A Jachkin; S.A Prushinsky; D Stryahilev; A Sazonov; A Nathan

Book ID: 117145402
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 213 KB
Volume: 297
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(01)00934-6

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