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Properties and characterization of low-temperature amorphous PECVD silicon nitride films for solar cell passivation

✍ Scribed by S. Ali; M. Gharghi; S. Sivoththaman; K. Zeaiter

Book ID: 106390248
Publisher: Springer
Year: 2005
Tongue: English
Weight: 1014 KB
Volume: 40
Category: Article
ISSN: 0022-2461
DOI: 10.1007/s10853-005-0585-z

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