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Characterization of nitrogenated amorphous carbon thin films grown by microwave surface wave plasma CVD

✍ Scribed by Hare Ram Aryal; Sudip Adhikari; Ashraf M. M. Omer; Sunil Adhikary; Hideo Uchida; Masayoshi Umeno

Book ID
108239037
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
119 KB
Volume
376-377
Category
Article
ISSN
0921-4526

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