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Effect of methane gas on the properties of nitrogenated amorphous carbon films grown by surface wave microwave plasma CVD

โœ Scribed by M. Rusop; A.M.M. Omer; S. Adhikary; T. Soga; T. Jimbo; M. Umeno


Book ID
116668737
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
265 KB
Volume
351
Category
Article
ISSN
0022-3093

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