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Effects of methane gas flow rate on the optoelectrical properties of nitrogenated carbon thin films grown by surface wave microwave plasma chemical vapor deposition

✍ Scribed by Rusop, M.; Adhikari, S.; Omer, A.M.M.; Soga, T.; Jimbo, T.; Umeno, M.

Book ID: 123384056
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 201 KB
Volume: 15
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2005.07.034

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