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Preparation of amorphous carbon thin films by ion beam assisted ECR-plasma CVD

โœ Scribed by K. Baba; R. Hatada

Book ID
114168362
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
372 KB
Volume
121
Category
Article
ISSN
0168-583X

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๐Ÿ“œ SIMILAR VOLUMES

Electronic properties of ion irradiated
Electronic properties of ion irradiated amorphous carbon films prepared by plasma assisted CVD method
โœ S Bhattacharyya; D Kanjilal; A Sayeed; V Meenakshi; SV Subramanyam ๐Ÿ“‚ Article ๐Ÿ“… 1996 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 425 KB

## Amorphous hydrogenated carbon films were prepared by plasma assisted CVD method. Their de conductivity was studied as a function of temperature in the range of 300 K to 10 K. films were then subjected to high energy (170 MeVI ion irradiation. After irradiation a marked change was observed in th