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Structural properties of amorphous carbon nitride films prepared by ion beam assisted deposition

✍ Scribed by A.S. Ferlauto; A. Champi; C.A. Figueroa; C.T.M. Ribeiro; F.C. Marques; F. Alvarez

Book ID: 116667765
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 294 KB
Volume: 338-340
Category: Article
ISSN: 0022-3093
DOI: 10.1016/j.jnoncrysol.2004.03.025

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