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Amorphous carbon and carbon nitride films prepared by filtered arc deposition and ion assisted arc deposition

โœ Scribed by J.P. Zhao; X. Wang; Z.Y. Chen; S.Q. Yang; T.S. Shi; X.H. Liu


Book ID
117358269
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
376 KB
Volume
33
Category
Article
ISSN
0167-577X

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