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Preparation of thin films by filtered arc deposition and ion assisted arc deposition

✍ Scribed by J.P. Zhao; X. Wang; Z.Y. Chen; S.Q. Yang; T.S. Shi; X.H. Liu; S.C. Zou

Book ID: 114169046
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 381 KB
Volume: 127-128
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(97)00013-x

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