Filtered vacuum arc deposition of semiconductor thin films

✍ Scribed by Boxman, R.L.; Goldsmith, S.; Ben-Shalom, A.; Kaplan, L.; Arbilly, D.; Gidalevich, E.; Zhitomirsky, V.; Ishaya, A.; Keidar, M.; Beilis, I.I.

• Book ID: 117862672
• Publisher: IEEE
• Year: 1995
• Tongue: English
• Weight: 783 KB
• Volume: 23
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/27.476479