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Filtered cathodic vacuum arc deposition of thin film copper

โœ Scribed by S.P Lau; Y.H Cheng; J.R Shi; P Cao; B.K Tay; X Shi


Book ID
117226593
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
482 KB
Volume
398-399
Category
Article
ISSN
0040-6090

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