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Deposition of permalloy films by filtered cathodic vacuum arc

✍ Scribed by J.S. Chen; S.P. Lau; Y.B. Zhang; Z. Sun; B.K. Tay; C.Q. Sun

Book ID: 108388748
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 273 KB
Volume: 443
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(03)01031-9

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