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SnO2 transparent conductor films produced by filtered vacuum arc deposition

✍ Scribed by A. Ben-Shalom; L. Kaplan; R.L. Boxman; S. Goldsmith; M. Nathan


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
583 KB
Volume
236
Category
Article
ISSN
0040-6090

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Ti-49.5 at%Ni thin films have been formed by deposition onto Si and glass substrates using a filtered arc deposition system (FADS). The films deposited on glass were composed of nanocrystalline parent phase grains contained within an amorphous matrix. The films deposited onto silicon were crystallin