Micromechanical properties of carbon nitride films deposited by radio-frequency-assisted filtered cathodic vacuum arc

✍ Scribed by Y.H. Cheng; B.K. Tay; S.P. Lau; X.L. Qiao; J.G. Chen; Z.H. Sun; C.S. Xie

• Publisher: Springer
• Year: 2002
• Tongue: English
• Weight: 276 KB
• Volume: 75
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s003390101068