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Structure and properties of zirconium oxide thin films prepared by filtered cathodic vacuum arc

✍ Scribed by G.Q. Yu; B.K. Tay; Z.W. Zhao


Publisher
Springer
Year
2005
Tongue
English
Weight
602 KB
Volume
81
Category
Article
ISSN
1432-0630

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## Abstract Tin oxide (SnO~2~) thin films were deposited on commercial microscope glass and UV fused silica substrates (UVFS) using spray pyrolysis and filtered vacuum arc deposition (FVAD) system. During deposition, the substrates temperature was kept at 400 Β°C. The structure and composition were