Properties of boron and phosphorous incorporated tetrahedral amorphous carbon films grown using filtered cathodic vacuum arc process

✍ Scribed by O.S. Panwar; Mohd Alim Khan; B.S. Satyanarayana; Sushil Kumar; Ishpal

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 726 KB
• Volume: 256
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2010.02.035