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Preparation of carbon nitride thin films by ion beam assisted deposition and their mechanical properties

✍ Scribed by M Kohzaki; A Matsumuro; T Hayashi; M Muramatsu; K Yamaguchi

Book ID: 114086194
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 410 KB
Volume: 308-309
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(97)00420-3

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