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Deposition of boron nitride thin films by ion beam assisted deposition

✍ Scribed by R.J. Bricault; P. Sioshansi; S.N. Bunker


Book ID
113278806
Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
141 KB
Volume
21
Category
Article
ISSN
0168-583X

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