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Properties of carbon nitride thin films prepared by ion and vapor deposition

✍ Scribed by J.F.D. Chubaci; T. Sakai; T. Yamamoto; K. Ogata; A. Ebe; F. Fujimoto

Book ID: 113284706
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 223 KB
Volume: 80-81
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(93)96161-5

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