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Synthesis and characterization of carbon nitride thin films prepared by rf plasma enhanced chemical vapor deposition

✍ Scribed by G.-Q. Yu; S.-H. Lee; D.-G. Lee; H.-D. Na; H.-S. Park; J.-J. Lee


Book ID
108423022
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
527 KB
Volume
154
Category
Article
ISSN
0257-8972

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