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Plasma-enhanced chemical vapor deposition of phosphorus nitride thin films: Auger spectroscopy characterization

✍ Scribed by J.L. Leclercq; J. Durand; L. Cot; R. Berjoan; C. Dupuy


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
646 KB
Volume
59
Category
Article
ISSN
0169-4332

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