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Properties of depth-profile controlled boron nitride films prepared by ion-beam assisted deposition

✍ Scribed by M. Kumagai; M. Suzuki; T. Suzuki; Y. Tanaka; Y. Setsuhara; S. Miyake; K. Ogata; M. Kohata; K. Higeta; T. Einishi; Y. Suzuki; Y. Shimoitani; Y. Motonami

Book ID: 114169075
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 577 KB
Volume: 127-128
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(97)00042-6

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