XANES and XPS characterization of hard amorphous CSixNy thin films grown by RF nitrogen plasma assisted pulsed laser deposition

✍ Scribed by T. Thärigen; D. Mayer; R. Hesse; P. Streubel; D. Lorenz; P. Grau; M. Lorenz; R. Szargan

• Publisher: Springer
• Year: 1999
• Tongue: English
• Weight: 106 KB
• Volume: 365
• Category: Article
• ISSN: 1618-2650
• DOI: 10.1007/s002160051481